From lindaw at snf.stanford.edu Wed May 7 06:29:02 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 7, 2003 6:29:02 AM Subject: Shutdown stsetch 2003-05-07 06:29:02: communications failure message Message-ID: wafer in chamber. From booth at snf.stanford.edu Wed May 7 06:50:14 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 7, 2003 6:50:14 AM Subject: Shutdown stsetch 2003-05-07 06:29:02: Report Clear for stsetch Message-ID: restarted system software, unloaded wafer from etch chamber, Linda reloaded her recipe. From lindaw at snf.stanford.edu Wed May 7 12:14:28 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 7, 2003 12:14:28 PM Subject: Comment stsetch 2003-05-07 12:14:27: flashlight needs batteries Message-ID: From ericp at snf.stanford.edu Wed May 7 07:32:17 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: May 7, 2003 7:32:17 PM Subject: Shutdown stsetch 2003-05-07 19:32:15: wafer broken in loadlock Message-ID: From cbaxter at snf.stanford.edu Wed May 7 10:35:55 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 7, 2003 10:35:55 PM Subject: Shutdown stsetch 2003-05-07 19:32:15: Report Clear for stsetch Message-ID: vacuum out broken wafer chips on load lock and chamber From lindaw at snf.stanford.edu Tue May 13 08:57:09 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 13, 2003 8:57:09 AM Subject: Shutdown stsetch 2003-05-13 08:57:08: windows application error message Message-ID: This message poped up right after the etch had finished. Wafer still in chamber. WINDOWSCONTROLLER An error has occured in you application. If you choose IGNORE you should save your work in a new file. If you choose close your application will terminate. From booth at snf.stanford.edu Tue May 13 09:39:25 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 13, 2003 9:39:25 AM Subject: Shutdown stsetch 2003-05-13 08:57:08: Report Clear for stsetch Message-ID: Wafer had finished etching, but unload option was not available yet. Restarted system & unloaded Lindas wafer. Vacuumed out broken wafer pieces from LoadLock (from previous wafer breakage???). From ycfu at snf.stanford.edu Sun May 25 08:35:13 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: May 25, 2003 8:35:13 AM Subject: Shutdown stsetch 2003-05-25 08:35:12: Report Shutdown for stsetch Message-ID: wafer broken From ycfu at snf.stanford.edu Sun May 25 09:40:40 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: May 25, 2003 9:40:40 AM Subject: Shutdown stsetch 2003-05-25 09:40:39: Report Shutdown for stsetch Message-ID: wafer broke inside the chamber From booth at snf.stanford.edu Tue May 27 02:01:47 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 27, 2003 2:01:47 PM Subject: Shutdown stsetch 2003-05-25 08:35:12: Report Clear for stsetch Message-ID: Cleaned up broken wafer pieces from etch chamber. discussed loading & process issues with user. From booth at snf.stanford.edu Tue May 27 04:33:59 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 27, 2003 4:33:59 PM Subject: Shutdown stsetch 2003-05-25 09:40:39: Report Clear for stsetch Message-ID: System software is working again. Ran 30 min O2 clean on dummy wafer. Chamber needs to be seasoned before normal etch process can be expected.