Shutdown stsetch 2003-05-13 08:57:08: Report Clear for stsetch

booth at snf.stanford.edu booth at snf.stanford.edu
Tue May 13 09:39:25 PDT 2003


Wafer had finished etching, but unload option
was not available yet.
Restarted system & unloaded Lindas wafer.
Vacuumed out broken wafer pieces from LoadLock
(from previous wafer breakage???).




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