Shutdown stsetch 2003-05-25 09:40:39: Report Clear for stsetch

booth at snf.stanford.edu booth at snf.stanford.edu
Tue May 27 04:33:59 PDT 2003


System software is working again.
Ran 30 min O2 clean on dummy wafer.
Chamber needs to be seasoned before
normal etch process can be expected.




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