From mislam at snf.stanford.edu Mon Nov 3 13:04:10 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 3 Nov 2003 13:04:10 -0800 Subject: Shutdown stsetch 2003-11-03 13:04:10: Machine stopped - compress air fault Message-ID: Machine stopped while wafer in process. Error window shows 'compressed air fault'. My wafer in the chamber. From booth at snf.stanford.edu Mon Nov 3 13:28:14 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 3 Nov 2003 13:28:14 -0800 Subject: Shutdown stsetch 2003-11-03 13:04:10: Machine stopped - compress air fault Message-ID: System logic seemed confused. No real problem found with compressed air unit. Restarted system software, ran one of Muhammads dummy wafers - OK. From bwacker at snf.stanford.edu Mon Nov 3 14:27:38 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Mon, 3 Nov 2003 14:27:38 -0800 Subject: Shutdown stsetch 2003-11-03 14:27:38: Compressed air failure Message-ID: From cbaxter at snf.stanford.edu Mon Nov 3 17:14:14 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Nov 2003 17:14:14 -0800 Subject: Shutdown stsetch 2003-11-03 14:27:38: Compressed air failure Message-ID: system is working fine. From bwacker at snf.stanford.edu Mon Nov 3 17:36:11 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Mon, 3 Nov 2003 17:36:11 -0800 Subject: Shutdown stsetch 2003-11-03 17:36:11: same problem Message-ID: From cbaxter at snf.stanford.edu Mon Nov 3 20:29:12 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Nov 2003 20:29:12 -0800 Subject: Shutdown stsetch 2003-11-03 17:36:11: same problem Message-ID: power down system and reasted mechanical realy. cycled system with different recipe without a problem From bwacker at snf.stanford.edu Tue Nov 4 07:05:24 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Tue, 4 Nov 2003 07:05:24 -0800 Subject: Comment stsetch 2003-11-04 07:05:23: Compressed air fault shut down Message-ID: After I reported the compressed air problem, I put the machine on shutdown and accepted the fault on the screen.It allowed me to still operate the machine before it could be fixed. From booth at snf.stanford.edu Tue Nov 4 07:11:20 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Tue, 4 Nov 2003 07:11:20 -0800 Subject: Comment stsetch 2003-11-04 07:05:23: Compressed air fault shut down Message-ID: still do not know reason for fault condition. From ericp at snf.stanford.edu Sun Nov 9 23:04:57 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 9 Nov 2003 23:04:57 -0800 Subject: Shutdown stsetch 2003-11-09 23:04:55: "waiting for handler" Message-ID: STS went into a locked up state "waiting for handler". From booth at snf.stanford.edu Mon Nov 10 07:25:27 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 10 Nov 2003 07:25:27 -0800 Subject: Shutdown stsetch 2003-11-09 23:04:55: "waiting for handler" Message-ID: no wafer seen in LoadLock or Etch Chamber. restarted system software, did load & unload cycle successrully. System is OK to run. From bwacker at snf.stanford.edu Wed Nov 12 14:42:03 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Wed, 12 Nov 2003 14:42:03 -0800 Subject: Problem stsetch 2003-11-12 14:42:02: Not pumping Message-ID: small fragment of cleanroom tissue got stuck on the loadlock o-ring and the machine is stuck - pumping alarm From booth at snf.stanford.edu Wed Nov 12 14:58:36 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Wed, 12 Nov 2003 14:58:36 -0800 Subject: Problem stsetch 2003-11-12 14:42:02: Not pumping Message-ID: I removed the piece of clean wipe & vented the LoadLock so Barbara could remove her wafer. From haniff at snf.stanford.edu Thu Nov 13 10:45:40 2003 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Thu, 13 Nov 2003 10:45:40 -0800 Subject: Shutdown stsetch 2003-11-13 10:45:39: broken wafer Message-ID: wafer broken in chamber From booth at snf.stanford.edu Thu Nov 13 15:10:01 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Thu, 13 Nov 2003 15:10:01 -0800 Subject: Shutdown stsetch 2003-11-13 10:45:39: broken wafer Message-ID: opened etch chamber & cleaned up pieces of wafer, did 1 hr O2 clean. Next user needs to season chamber before next wafer is priocessed. From daesung at snf.stanford.edu Tue Nov 25 00:50:57 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 25 Nov 2003 00:50:57 -0800 Subject: Problem stsetch 2003-11-25 00:50:57: ICP not available alarm Message-ID: Transfer commands became deactivated. From mislam at snf.stanford.edu Tue Nov 25 07:40:48 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 25 Nov 2003 07:40:48 -0800 Subject: Shutdown stsetch 2003-11-25 07:40:48: Software problem - "Application Error" Message-ID: An "Application Error" window came up while trying to edit a recipe. Software may need a reboot. From hphan at snf.stanford.edu Tue Nov 25 11:12:27 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 25 Nov 2003 11:12:27 -0800 Subject: Shutdown stsetch 2003-11-25 07:40:48: Software problem - "Application Error" Message-ID: From hphan at snf.stanford.edu Tue Nov 25 11:12:44 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 25 Nov 2003 11:12:44 -0800 Subject: Problem stsetch 2003-11-25 00:50:57: ICP not available alarm Message-ID: