Shutdown stsetch 2003-10-13 08:16:22: Report Clear for stsetch
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Oct 13 08:22:39 PDT 2003
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Shutdown stsetch 2003-10-13 08:18:43: Report Clear for stsetch
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Shutdown stsetch 2003-10-23 08:45:32: Found broken wafer in chamber
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Shutdown stsetch 2003-10-13 08:18:43: Report Clear for stsetch
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Shutdown stsetch 2003-10-23 08:45:32: Found broken wafer in chamber
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