From afreeman at snf.stanford.edu Tue Sep 2 08:17:09 2003 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: Sep 2, 2003 8:17:09 PM Subject: Problem stsetch 2003-09-02 20:17:07: Report Problem for stsetch Message-ID: Interlock failure alarm came on when the process was started. The process did not start. Wafer inside. From booth at snf.stanford.edu Wed Sep 3 06:55:46 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 3, 2003 6:55:46 AM Subject: Problem stsetch 2003-09-02 20:17:07: Report Clear for stsetch Message-ID: Could not find reported wafer left in etch chamber. No e-mail or CORAL report of what happened to wafer. Loaded & Unloaded dummy wafer to check wafer handling - all look OK. From bwacker at snf.stanford.edu Thu Sep 4 03:51:57 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Sep 4, 2003 3:51:57 PM Subject: Problem stsetch 2003-09-04 15:51:56: Report Problem for stsetch Message-ID: My wafer is still in the chamber after unload. Please help to get it out. Thank you barbara From cbaxter at snf.stanford.edu Thu Sep 4 04:16:16 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 4, 2003 4:16:16 PM Subject: Shutdown stsetch 2003-09-04 16:16:15: Report Shutdown for stsetch Message-ID: wafer stuck inside the chamber From cbaxter at snf.stanford.edu Thu Sep 4 04:23:34 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 4, 2003 4:23:34 PM Subject: Problem stsetch 2003-09-04 15:51:56: Report Clear for stsetch Message-ID: From cbaxter at snf.stanford.edu Thu Sep 4 04:24:21 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 4, 2003 4:24:21 PM Subject: Shutdown stsetch 2003-09-04 16:16:15: Report Clear for stsetch Message-ID: was able to unload wafer on auto mode by rebooting the tool. From mislam at snf.stanford.edu Wed Sep 10 09:50:14 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sep 10, 2003 9:50:14 AM Subject: Problem stsetch 2003-09-10 09:50:14: Computer crashed - can not get wafer out Message-ID: After a run was completed an 'Application error' message poped up with 'ignore' or 'close' option. After pressing ignore couple of time, machine went into DOS mode. My wafer inside chamber. From mislam at snf.stanford.edu Wed Sep 10 10:02:30 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sep 10, 2003 10:02:30 AM Subject: Shutdown stsetch 2003-09-10 10:02:27: Computer freezed up Message-ID: Nancy tried to help restart the computer but it is frozen, won't response. From booth at snf.stanford.edu Wed Sep 10 10:41:51 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 10, 2003 10:41:51 AM Subject: Shutdown stsetch 2003-09-10 10:02:27: Report Clear for stsetch Message-ID: had to do a hot reboot to unfreeze control system. From booth at snf.stanford.edu Wed Sep 10 10:42:50 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 10, 2003 10:42:50 AM Subject: Problem stsetch 2003-09-10 09:50:14: Report Clear for stsetch Message-ID: same as shutdown message. From mislam at snf.stanford.edu Thu Sep 11 07:49:49 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sep 11, 2003 7:49:49 AM Subject: Shutdown stsetch 2003-09-11 07:49:49: small string of something in chamber Message-ID: While inspecting chamber before enabling the system, observed a hair like string in the chamber. I am concern because it it close to the helium seal ring. From latta at snf.stanford.edu Thu Sep 11 12:10:17 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 11, 2003 12:10:17 PM Subject: Shutdown stsetch 2003-09-11 07:49:49: Report Clear for stsetch Message-ID: Len removed 'hairy' little piece, O2CLEAN for 60 mins followed by 30 min DEEP conditioning. From cbaxter at snf.stanford.edu Mon Sep 15 04:08:28 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 15, 2003 4:08:28 PM Subject: Shutdown stsetch 2003-09-15 16:08:28: Report Shutdown for stsetch Message-ID: load lock pump is leaking fomblin oil. it need to be change. From cbaxter at snf.stanford.edu Mon Sep 15 06:31:54 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 15, 2003 6:31:54 PM Subject: Shutdown stsetch 2003-09-15 16:08:28: Report Clear for stsetch Message-ID: completed load lock changed.. From sguan at snf.stanford.edu Wed Sep 17 06:06:07 2003 From: sguan at snf.stanford.edu (sguan at snf.stanford.edu) Date: Sep 17, 2003 6:06:07 PM Subject: Comment stsetch 2003-09-17 18:06:07: Report Comment for stsetch Message-ID: Done early - machine is free at 6:05pm.