From izuleta at snf.stanford.edu Sat Apr 10 23:03:22 2004 From: izuleta at snf.stanford.edu (izuleta at snf.stanford.edu) Date: Sat, 10 Apr 2004 23:03:22 -0700 Subject: Shutdown stsetch 2004-04-10 23:03:21: Broken Wafer Inside :( Message-ID: Wafer Broke Inside: After 30 min + 22 min of SMOODEP. Did not run with broken wafer more than a couple of minutes. 2um Al layer was used as mask. Resist was previusly stripped in Matrix. From eenriquez at snf.stanford.edu Mon Apr 12 09:48:15 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Apr 2004 09:48:15 -0700 Subject: Shutdown stsetch 2004-04-10 23:03:21: Broken Wafer Inside :( Message-ID: Removed broken wafer and wiped down the chamber. Ran 30 minutes O2 clean. From adaven at snf.stanford.edu Mon Apr 12 19:12:27 2004 From: adaven at snf.stanford.edu (adaven at snf.stanford.edu) Date: Mon, 12 Apr 2004 19:12:27 -0700 Subject: Problem stsetch 2004-04-12 19:12:26: software crash Message-ID: software crashed, wafer still in chamber, got assistance in restarting program but now software will not let user unload or process From eenriquez at snf.stanford.edu Tue Apr 13 07:52:37 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Apr 2004 07:52:37 -0700 Subject: Problem stsetch 2004-04-12 19:12:26: software crash Message-ID: Re-started windows From eenriquez at snf.stanford.edu Mon Apr 19 12:40:11 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Apr 2004 12:40:11 -0700 Subject: Problem stsetch 2004-04-19 10:43:00: still has problem with C4F8 mass flow controller Message-ID: Cylinder pressure was set too high. Lowered to 25 psi. From mislam at snf.stanford.edu Tue Apr 27 07:50:21 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 27 Apr 2004 07:50:21 -0700 Subject: Problem stsetch 2004-04-27 07:50:20: "Interlock tripped" error Message-ID: Etch started then stopped due to the error. From me342a at snf.stanford.edu Tue Apr 27 10:10:39 2004 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Tue, 27 Apr 2004 10:10:39 -0700 Subject: Shutdown stsetch 2004-04-27 10:10:39: interlock trippped error Message-ID: From eenriquez at snf.stanford.edu Tue Apr 27 14:33:39 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Apr 2004 14:33:39 -0700 Subject: Shutdown stsetch 2004-04-27 10:10:39: interlock trippped error Message-ID: Arcing inside the chamber which caused the plasma to go out. -Ran an O2 plasma clean for about 1 hour. Ran SMOOSHAl and DEEP recipes with no problem. From eenriquez at snf.stanford.edu Tue Apr 27 14:34:57 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Apr 2004 14:34:57 -0700 Subject: Problem stsetch 2004-04-27 07:50:20: "Interlock tripped" error Message-ID: Arcing inside the chamber which caused the plasma to go out. - Ran O2 plasma clean for about an hour. Ran smooshal and deep recipes with no problems. From eenriquez at snf.stanford.edu Tue Apr 27 14:36:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Apr 2004 14:36:22 -0700 Subject: Comment stsetch 2004-03-23 07:30:20: Switched freon 318 gas cylinder Message-ID: Reconnected to freon 318 house line From me342a at snf.stanford.edu Wed Apr 28 09:27:58 2004 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Wed, 28 Apr 2004 09:27:58 -0700 Subject: Problem stsetch 2004-04-28 09:27:57: interlock tripped Message-ID: same problem as yesterday From me342a at snf.stanford.edu Wed Apr 28 11:01:56 2004 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Wed, 28 Apr 2004 11:01:56 -0700 Subject: Shutdown stsetch 2004-04-28 11:01:56: tripped interlock again Message-ID: From latta at snf.stanford.edu Wed Apr 28 11:03:00 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Apr 2004 11:03:00 -0700 Subject: Shutdown stsetch 2004-04-28 11:02:59: flickering and crackling have returned Message-ID: same as yesterday- tried 60 min O2 clean, but it didn't help..... From eenriquez at snf.stanford.edu Wed Apr 28 15:41:29 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2004 15:41:29 -0700 Subject: Shutdown stsetch 2004-04-28 11:02:59: flickering and crackling have returned Message-ID: Found lots of dark colored particles inside the matching network. Looks silver oxide flakes from rf conductors. Cleaned matching network. Ran several test with no problems. From eenriquez at snf.stanford.edu Wed Apr 28 15:42:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2004 15:42:41 -0700 Subject: Shutdown stsetch 2004-04-28 11:01:56: tripped interlock again Message-ID: Cleaned matching network From eenriquez at snf.stanford.edu Wed Apr 28 15:43:05 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2004 15:43:05 -0700 Subject: Problem stsetch 2004-04-28 09:27:57: interlock tripped Message-ID: Cleaned matching network From quickwin at snf.stanford.edu Thu Apr 29 18:29:58 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 29 Apr 2004 18:29:58 -0700 Subject: Shutdown stsetch 2004-04-29 18:29:57: interlock tripped constantly Message-ID: Nancy suggested to run O2 clean in order to get rid of the interlock trip problem. But even O2 clean recipe could not proceed, due to interlock tripping problem. I also noticed that the etch rate during the past 20 days has been much faster than it used to be. Maybe it is time for a through clean of the system? From eenriquez at snf.stanford.edu Fri Apr 30 12:20:32 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Apr 2004 12:20:32 -0700 Subject: Shutdown stsetch 2004-04-29 18:29:57: interlock tripped constantly Message-ID: installed new tuning capacitor. Ran several recipes with no problem.