Shutdown stsetch 2004-04-10 23:03:21: Broken Wafer Inside :(

izuleta at izuleta at
Sat Apr 10 23:03:22 PDT 2004

Wafer Broke Inside: After 30 min + 22 min of SMOODEP. Did not run with broken wafer more than a couple of minutes. 2um Al layer was used as mask. Resist was previusly stripped in Matrix.

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