Problem stsetch 2004-04-27 07:50:20: "Interlock tripped" error

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Apr 27 07:50:21 PDT 2004

Previous message: Problem stsetch 2004-04-19 10:43:00: still has problem with C4F8 mass flow controller
Next message: Problem stsetch 2004-04-27 07:50:20: "Interlock tripped" error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Etch started then stopped due to the error.

Previous message: Problem stsetch 2004-04-19 10:43:00: still has problem with C4F8 mass flow controller
Next message: Problem stsetch 2004-04-27 07:50:20: "Interlock tripped" error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list