Shutdown stsetch 2004-04-27 10:10:39: interlock trippped error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 27 14:33:39 PDT 2004


Arcing inside the chamber which caused the plasma to go out.  -Ran an O2 plasma clean for about 1 hour. Ran SMOOSHAl and DEEP recipes with no problem.




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