Problem stsetch 2004-04-27 07:50:20: "Interlock tripped" error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 27 14:34:57 PDT 2004


Arcing inside the chamber which caused the plasma to go out.
- Ran O2 plasma clean for about an hour.  Ran smooshal and deep recipes with no problems.




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