Shutdown stsetch 2004-04-29 18:29:57: interlock tripped constantly

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Thu Apr 29 18:29:58 PDT 2004


Nancy suggested to run O2 clean in order to get rid of the interlock trip problem. But even O2 clean recipe could not proceed, due to interlock tripping problem.
I also noticed that the etch rate during the past 20 days has been much faster than it used to be.  Maybe it is time for a through clean of the system?




More information about the stsetch-pcs mailing list