From eenriquez at snf.stanford.edu Mon Aug 2 11:05:43 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Aug 2004 11:05:43 -0700 Subject: Shutdown stsetch SNF 2004-08-02 11:05:42: No RF Message-ID: Looks like a bad chiller From eenriquez at snf.stanford.edu Mon Aug 2 15:29:12 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Aug 2004 15:29:12 -0700 Subject: Shutdown stsetch SNF 2004-08-02 11:05:42: No RF Message-ID: Replaced the chiller. The pump on the old chiller has a bad impeller. From eenriquez at snf.stanford.edu Mon Aug 2 15:30:20 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Aug 2004 15:30:20 -0700 Subject: Problem stsetch SNF 2004-07-30 22:37:48: No plasma: Platen power out of tolerance message Message-ID: Replaced the chiller. From crichter at snf.stanford.edu Fri Aug 6 06:42:38 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 6 Aug 2004 06:42:38 -0700 Subject: Comment stsetch SNF 2004-08-06 06:42:37: Out of Range Light for He Pressure in standby only Message-ID: Pressure reading was 11.64. Yellow Out of Range light went away and the He pressure was normal (9.79) when the DEEP recipe was running. Is this pressure common in a standby mode? The He flow was ok at a steady 2.80 during the etch run. From barlian at snf.stanford.edu Tue Aug 10 03:51:33 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Tue, 10 Aug 2004 03:51:33 -0700 Subject: Problem stsetch SNF 2004-08-10 03:51:33: software crashed Message-ID: From latta at snf.stanford.edu Tue Aug 10 10:19:48 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 10 Aug 2004 10:19:48 -0700 Subject: Comment stsetch SNF 2004-08-06 06:42:37: Out of Range Light for He Pressure in standby only Message-ID: Woarks as it should- talked to user From cbaxter at snf.stanford.edu Tue Aug 10 12:20:43 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Aug 2004 12:20:43 -0700 Subject: Problem stsetch SNF 2004-08-10 03:51:33: software crashed Message-ID: system was reboot. From alissa at snf.stanford.edu Wed Aug 11 10:15:56 2004 From: alissa at snf.stanford.edu (alissa at snf.stanford.edu) Date: Wed, 11 Aug 2004 10:15:56 -0700 Subject: Shutdown stsetch SNF 2004-08-11 10:15:55: wafer broke in chamber Message-ID: wafer broke during load. please save wafer pieces. sorry. From eenriquez at snf.stanford.edu Wed Aug 11 12:36:03 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Aug 2004 12:36:03 -0700 Subject: Shutdown stsetch SNF 2004-08-11 10:15:55: wafer broke in chamber Message-ID: Removed broken wafer from the chamber. Wiped down the platten and ran conditioning wafer (O2 plasma fro 25 min). From jgarate at snf.stanford.edu Wed Aug 25 07:42:36 2004 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Wed, 25 Aug 2004 07:42:36 -0700 Subject: Shutdown stsetch SNF 2004-08-25 07:42:35: Broken Wafer Message-ID: Problem reported to staff. at 07:40am From eenriquez at snf.stanford.edu Wed Aug 25 10:00:55 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Aug 2004 10:00:55 -0700 Subject: Shutdown stsetch SNF 2004-08-25 07:42:35: Broken Wafer Message-ID: Remove broken wafer and cleaned the chamber. Ran a 25 minute O2 clean. From crichter at snf.stanford.edu Thu Aug 26 17:34:14 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 26 Aug 2004 17:34:14 -0700 Subject: Problem stsetch SNF 2004-08-26 17:34:14: out of range for He flow when holder is used Message-ID: From cbaxter at snf.stanford.edu Thu Aug 26 18:00:58 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Aug 2004 18:00:58 -0700 Subject: Problem stsetch SNF 2004-08-26 17:34:14: out of range for He flow when holder is used Message-ID: backside leak without the carrier is 2sccm and stable i cleaned the backside of the carrier and retest he cooling leak is 2.5..