Comment stsetch SNF 2004-08-06 06:42:37: Out of Range Light for He Pressure in standby only

crichter at snf.stanford.edu crichter at snf.stanford.edu
Fri Aug 6 06:42:38 PDT 2004


Pressure reading was 11.64.  Yellow Out of Range light went away and the He pressure was normal (9.79) when the DEEP recipe was running. Is this pressure common in a standby mode? The He flow was ok at a steady 2.80 during the etch run.




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