Shutdown stsetch SNF 2004-08-11 10:15:55: wafer broke in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Aug 11 12:36:03 PDT 2004


Removed broken wafer from the chamber.  Wiped down the platten and ran conditioning wafer (O2 plasma fro 25 min).




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