Problem stsetch SNF 2004-08-26 17:34:14: out of range for He flow when holder is used

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Aug 26 18:00:58 PDT 2004


backside leak without the carrier is 2sccm and stable
i cleaned the backside of the carrier and retest
he cooling leak is 2.5..




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