From cbaxter at snf.stanford.edu Wed Dec 1 01:22:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Dec 2004 01:22:41 -0800 Subject: Shutdown stsetch SNF 2004-11-30 16:34:05: wafer transfer failed Message-ID: insert guide screw back in guide block and adjusted hard stop. From vossough at snf.stanford.edu Wed Dec 1 23:16:32 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Wed, 1 Dec 2004 23:16:32 -0800 Subject: Shutdown stsetch SNF 2004-12-01 23:16:31: error;"...interlock tripped" Message-ID: My wafer is still inside. Didn't get plasma, got the error few seconds after hitting "process". Please leave wafer in the box with my name and Lilliputian Systems name, in the rollaround box next to the equipment. thanks. From eenriquez at snf.stanford.edu Thu Dec 2 08:28:35 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Dec 2004 08:28:35 -0800 Subject: Shutdown stsetch SNF 2004-12-01 23:16:31: error;"...interlock tripped" Message-ID: Cleared error and tried to run the fastdeep recipe but it faulted again. Loaded the deep recipe and it ran ok. Reloade the fastdeep recipe and it was ok. From eenriquez at snf.stanford.edu Mon Dec 13 09:44:33 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Dec 2004 09:44:33 -0800 Subject: Shutdown stsetch SNF 2004-12-13 09:44:32: wafer stuck in the chamber Message-ID: From latta at snf.stanford.edu Tue Dec 14 15:59:44 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Dec 2004 15:59:44 -0800 Subject: Shutdown stsetch SNF 2004-12-13 09:44:32: wafer stuck in the chamber Message-ID: Ceramic plate replaced; holder ring replaced. Vacuum line and valves cleaned. O2 chamber clean and seasoning performed.