Shutdown stsetch SNF 2004-12-01 23:16:31: error;"...interlock tripped"

vossough at vossough at
Wed Dec 1 23:16:32 PST 2004

My wafer is still inside. Didn't get plasma, got the error few seconds after hitting "process".
Please leave wafer in the box with my name and Lilliputian Systems name, in the rollaround box next to the equipment.

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