Shutdown stsetch SNF 2004-12-01 23:16:31: error;"...interlock tripped"

vossough at snf.stanford.edu vossough at snf.stanford.edu
Wed Dec 1 23:16:32 PST 2004


My wafer is still inside. Didn't get plasma, got the error few seconds after hitting "process".
Please leave wafer in the box with my name and Lilliputian Systems name, in the rollaround box next to the equipment.
thanks.




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