Shutdown stsetch SNF 2004-12-13 09:44:32: wafer stuck in the chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Dec 13 09:44:33 PST 2004
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Shutdown stsetch SNF 2004-12-01 23:16:31: error;"...interlock tripped"
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