From ericp at snf.stanford.edu Wed Feb 4 22:41:24 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 4 Feb 2004 22:41:24 -0800 Subject: Problem stsetch 2004-02-04 22:41:23: STSetch- "operator station timeout" Message-ID: Wafer is still etching, but it looks like it lost comm. -Eric From cbaxter at snf.stanford.edu Wed Feb 4 23:05:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Feb 2004 23:05:23 -0800 Subject: Problem stsetch 2004-02-04 22:41:23: STSetch- "operator station timeout" Message-ID: reboot system From kenney at snf.stanford.edu Sun Feb 8 01:50:13 2004 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Sun, 8 Feb 2004 01:50:13 -0800 Subject: Problem stsetch 2004-02-08 01:50:13: Broken Wafer Message-ID: Wafer broke in chamber From cbaxter at snf.stanford.edu Mon Feb 9 16:17:53 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Feb 2004 16:17:53 -0800 Subject: Problem stsetch 2004-02-08 01:50:13: Broken Wafer Message-ID: broken was cleaned by Eric P, Ceramic was replaced and teflon cap insulator. From vossough at snf.stanford.edu Thu Feb 12 03:01:43 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Thu, 12 Feb 2004 03:01:43 -0800 Subject: Shutdown stsetch 2004-02-12 03:01:42: wafer inside Message-ID: No etch. No plasma. Upon clicking "process", alarm was tripped. Tried to retrieve wafer by clicking "accept" and "abort" several times, but a windows error message popped and closed the operator screen. No data communication when tried running system operatror program. An accidental bump on the keyboard brought the present display. From seymour at snf.stanford.edu Thu Feb 12 09:18:05 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 Feb 2004 09:18:05 -0800 Subject: Shutdown stsetch 2004-02-12 03:01:42: wafer inside Message-ID: Rebooted windows and unloaded wafer. Cleaned and wiped down the loadlock. Elmer Enriquez