From latta at snf.stanford.edu Mon Jan 5 14:04:28 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mon, 5 Jan 2004 14:04:28 -0800 Subject: Shutdown stsetch 2003-12-19 11:30:17: Holiday Shutdown Message-ID: Back from holiday From mislam at snf.stanford.edu Tue Jan 13 06:47:05 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 13 Jan 2004 06:47:05 -0800 Subject: Shutdown stsetch 2004-01-13 06:47:05: Found Si fragments left in chamber Message-ID: While inspecting chamber before start to run observed few Si fragments in the chamber. They appear to be very small pieces, one could miss them if not carefully inspected. From rcrane at snf.stanford.edu Tue Jan 13 07:24:00 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 13 Jan 2004 07:24:00 -0800 Subject: Shutdown stsetch 2004-01-13 06:47:05: Found Si fragments left in chamber Message-ID: <40040D90.EF8CDEDE@snf.stanford.edu> STSetch users, This shutdown will remain with us until 4:00pm when Cesar arrives. Len's replacement has verbally accepted the job offer and should start on February 2. My plans to have him on board prior to Len's leaving simply didn't work out. Sorry for the inconvenience, Dick From latta at snf.stanford.edu Tue Jan 13 13:18:13 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Jan 2004 13:18:13 -0800 Subject: Shutdown stsetch 2004-01-13 06:47:05: Found Si fragments left in chamber Message-ID: Ericp cleaned out Si pieces. From tkramer at snf.stanford.edu Mon Jan 19 03:34:29 2004 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Mon, 19 Jan 2004 03:34:29 -0800 Subject: Problem stsetch 2004-01-19 03:34:28: silicon fragments in chamber? Message-ID: I think I see silicon fragments in the chamber at the conclusion of my etch. I wanted a second opinion before shutting down the machine, but no one is here right now to ask. From ericp at snf.stanford.edu Mon Jan 19 23:49:24 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 19 Jan 2004 23:49:24 -0800 Subject: Comment stsetch 2004-01-19 23:49:24: tiny water seepage at the turbo PCW fitting Message-ID: At the 1/2" swagelok reducer (about 6" from the turbo) on the PCW line, there is some water seepage. You can see a dried trail of PCW on the machine. I put a towel over the fitting. From mislam at snf.stanford.edu Tue Jan 20 09:04:40 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 20 Jan 2004 09:04:40 -0800 Subject: Problem stsetch 2004-01-20 09:04:40: Communication Failure Alarm Message-ID: Message: "ICP serial communication failure alarm" Can not process wafer, process buttons not active. From cbaxter at snf.stanford.edu Tue Jan 20 18:15:16 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Jan 2004 18:15:16 -0800 Subject: Problem stsetch 2004-01-20 09:04:40: Communication Failure Alarm Message-ID: reset system From cbaxter at snf.stanford.edu Tue Jan 20 18:15:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Jan 2004 18:15:41 -0800 Subject: Comment stsetch 2004-01-19 23:49:24: tiny water seepage at the turbo PCW fitting Message-ID: changed 1/2 swagelock fitting From cbaxter at snf.stanford.edu Tue Jan 20 18:15:58 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Jan 2004 18:15:58 -0800 Subject: Problem stsetch 2004-01-19 03:34:28: silicon fragments in chamber? Message-ID: From daneman at snf.stanford.edu Thu Jan 22 16:04:17 2004 From: daneman at snf.stanford.edu (daneman at snf.stanford.edu) Date: Thu, 22 Jan 2004 16:04:17 -0800 Subject: Problem stsetch 2004-01-22 16:04:17: Air pressure fault Message-ID: From cbaxter at snf.stanford.edu Thu Jan 22 16:23:27 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 22 Jan 2004 16:23:27 -0800 Subject: Problem stsetch 2004-01-22 16:04:17: Air pressure fault Message-ID: adjusted air pressure From fumin at snf.stanford.edu Sat Jan 24 05:42:12 2004 From: fumin at snf.stanford.edu (fumin at snf.stanford.edu) Date: Sat, 24 Jan 2004 05:42:12 -0800 Subject: Problem stsetch 2004-01-24 05:42:12: Report Problem for stsetch Message-ID: There is one or 2 broken piece of wafer in the chamber. 2cm by 4 cm From bchui at snf.stanford.edu Sat Jan 24 12:44:36 2004 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 24 Jan 2004 12:44:36 -0800 Subject: Comment stsetch 2004-01-24 12:44:36: Didn't see any fragments Message-ID: Are those 'fragments' reported by the previous user actually machine electrodes? From latta at snf.stanford.edu Tue Jan 27 15:27:47 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Jan 2004 15:27:47 -0800 Subject: Problem stsetch 2004-01-24 05:42:12: Report Problem for stsetch Message-ID: I don't think there are pieces of wafer on the chuck now. From latta at snf.stanford.edu Tue Jan 27 15:28:46 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Jan 2004 15:28:46 -0800 Subject: Comment stsetch 2004-01-24 12:44:36: Didn't see any fragments Message-ID: agree and verified by checking He flow and pressure. Everything is stable. From mislam at snf.stanford.edu Fri Jan 30 07:51:51 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 30 Jan 2004 07:51:51 -0800 Subject: Problem stsetch 2004-01-30 07:51:50: Si Fragments Message-ID: After unloading wafer left by last user found Si fragments left in chamber. Did not see the fragments while wafer was in the chamber as they were beneath the wafer area. From latta at snf.stanford.edu Fri Jan 30 10:26:34 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 30 Jan 2004 10:26:34 -0800 Subject: Problem stsetch 2004-01-30 07:51:50: Si Fragments Message-ID: Took a look at the reported fragments- I think it is ok to run. Advised user to check He flow for stability. I will speak to previous about fragments...