Problem stsetch 2004-01-19 03:34:28: silicon fragments in chamber?

tkramer at snf.stanford.edu tkramer at snf.stanford.edu
Mon Jan 19 03:34:29 PST 2004


I think I see silicon fragments in the chamber at the conclusion of my etch.  I wanted a second opinion before shutting down the machine, but no one is here right now to ask.




More information about the stsetch-pcs mailing list