Problem stsetch 2004-01-30 07:51:50: Si Fragments

mislam at snf.stanford.edu mislam at snf.stanford.edu
Fri Jan 30 07:51:51 PST 2004


After unloading wafer left by last user found Si
fragments left in chamber.  Did not see the fragments
 while wafer was in the chamber as they were beneath
the wafer area.




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