Problem stsetch SNF 2004-07-30 22:37:48: No plasma: Platen power out of tolerance message
daesung at snf.stanford.edu
daesung at snf.stanford.edu
Fri Jul 30 22:37:49 PDT 2004
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Shutdown stsetch SNF 2004-07-06 16:15:40: Shutdown for Exhaust clean
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Previous message:
Shutdown stsetch SNF 2004-07-06 16:15:40: Shutdown for Exhaust clean
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