From aeonia at snf.stanford.edu Sat Mar 6 02:11:17 2004 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Sat, 6 Mar 2004 02:11:17 -0800 Subject: Problem stsetch 2004-03-06 02:11:16: interlock tripped Message-ID: I left the machine to run for 2.5hrs, and when I came back, it showed some error message window which said 'air something failed' ( i don't exactly remamber). When I closed the window, the program was turned off with the message 'interlock tripped'. I can not open the program window back and my wafer is still in the chamber. From ericp at snf.stanford.edu Sat Mar 6 14:29:08 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 6 Mar 2004 14:29:08 -0800 Subject: Comment stsetch 2004-03-06 14:29:07: Machine ok now. Message-ID: Found machine was improperly re-booted and in an unknown state. From eenriquez at snf.stanford.edu Mon Mar 8 07:36:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2004 07:36:21 -0800 Subject: Problem stsetch 2004-03-06 02:11:16: interlock tripped Message-ID: Must have been a glitch in the air pressure. Machine OK now. From eenriquez at snf.stanford.edu Mon Mar 8 07:36:33 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2004 07:36:33 -0800 Subject: Comment stsetch 2004-03-06 14:29:07: Machine ok now. Message-ID: From aag at snf.stanford.edu Sun Mar 21 11:03:41 2004 From: aag at snf.stanford.edu (aag at snf.stanford.edu) Date: Sun, 21 Mar 2004 11:03:41 -0800 Subject: Shutdown stsetch 2004-03-21 11:03:40: wafer broke after loading Message-ID: wafer broke in chamber before starting process. there is quartz backing wafer that looks in tact but top wafer broke. From cbaxter at snf.stanford.edu Sun Mar 21 16:06:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 21 Mar 2004 16:06:41 -0800 Subject: Shutdown stsetch 2004-03-21 11:03:40: wafer broke after loading Message-ID: Eric and I cleaned the broken wafer chips From naiqian at snf.stanford.edu Tue Mar 23 07:29:07 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Tue, 23 Mar 2004 07:29:07 -0800 Subject: Problem stsetch 2004-03-23 07:29:06: communication time out Message-ID: after click "laod", the machine show the message as "operation shut down, communication time out" From eenriquez at snf.stanford.edu Tue Mar 23 07:30:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Mar 2004 07:30:21 -0800 Subject: Comment stsetch 2004-03-23 07:30:20: Switched freon 318 gas cylinder Message-ID: Temporarily switched the freon 318 gas source from the gas line to the cylinder next to the system so that we can tie in the new STS etcher to the gas line. From eenriquez at snf.stanford.edu Tue Mar 23 07:50:45 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Mar 2004 07:50:45 -0800 Subject: Problem stsetch 2004-03-23 07:29:06: communication time out Message-ID: restarted windows. From haniff at snf.stanford.edu Wed Mar 24 16:52:43 2004 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Wed, 24 Mar 2004 16:52:43 -0800 Subject: Shutdown stsetch 2004-03-24 16:52:41: software in confused state Message-ID: Getting numerous load errors and wafer location errors. Shutdown at Ceasars request. From cbaxter at snf.stanford.edu Wed Mar 24 18:51:51 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 24 Mar 2004 18:51:51 -0800 Subject: Shutdown stsetch 2004-03-24 16:52:41: software in confused state Message-ID: system lock up, power down and reboot pc.