Problem stsetch 2004-03-06 02:11:16: interlock tripped

aeonia at aeonia at
Sat Mar 6 02:11:17 PST 2004

I left the machine to run for 2.5hrs, and when I came back, it showed some error message window which said 'air something failed' ( i don't exactly remamber). When I closed the window, the program was turned off with the message 'interlock tripped'. I can not open the program window back and my wafer is still in the chamber.

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