Problem stsetch 2004-03-06 02:11:16: interlock tripped

[aeonia at snf.stanford.edu]

I left the machine to run for 2.5hrs, and when I came back, it showed some error message window which said 'air something failed' ( i don't exactly remamber). When I closed the window, the program was turned off with the message 'interlock tripped'. I can not open the program window back and my wafer is still in the chamber.