Shutdown stsetch 2004-03-21 11:03:40: wafer broke after loading

aag at snf.stanford.edu aag at snf.stanford.edu
Sun Mar 21 11:03:41 PST 2004


wafer broke in chamber before starting process.  there is quartz backing wafer that looks in tact but top wafer broke.




More information about the stsetch-pcs mailing list