From barlian at snf.stanford.edu Sun May 2 18:10:01 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sun, 2 May 2004 18:10:01 -0700 Subject: Problem stsetch 2004-05-02 18:10:01: error in "windowc", the monitor shut down Message-ID: Just right after I hit the "abort" button to end the process, a window came out saying "error in windowc.. bla bla bla.. hit shutdown or close". I was forced to choose since the whole screen is frozen, so I hit "close" and the window closed. Somebody who's a frequent user of sts told me he experienced the same thing and that I need the password to bring the window back, which he and I don't know. From eenriquez at snf.stanford.edu Mon May 3 07:55:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 May 2004 07:55:58 -0700 Subject: Problem stsetch 2004-05-02 18:10:01: error in "windowc", the monitor shut down Message-ID: Restarted STS monitor program and unloaded wafer. From hanjun at snf.stanford.edu Mon May 3 19:02:28 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Mon, 3 May 2004 19:02:28 -0700 Subject: Problem stsetch 2004-05-03 19:02:27: doesn't pump down in time Message-ID: loadlock itself was released after a while anyways that I could retrieve my wafer. From hanjun at snf.stanford.edu Mon May 3 19:21:47 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Mon, 3 May 2004 19:21:47 -0700 Subject: Problem stsetch 2004-05-03 19:21:46: doesn't know the password... Message-ID: clicked a wrong icon on the screen when the window went small, but doesn't know the password... sorry about that.. From eenriquez at snf.stanford.edu Tue May 4 09:06:40 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 May 2004 09:06:40 -0700 Subject: Shutdown stsetch 2004-05-04 09:06:40: loadlock controller not functioning Message-ID: LL controller is not sequencing properly. From eenriquez at snf.stanford.edu Tue May 4 09:50:56 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 May 2004 09:50:56 -0700 Subject: Shutdown stsetch 2004-05-04 09:06:40: loadlock controller not functioning Message-ID: Reset loadlock controller and system computer. From eenriquez at snf.stanford.edu Tue May 4 09:51:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 May 2004 09:51:22 -0700 Subject: Problem stsetch 2004-05-03 19:21:46: doesn't know the password... Message-ID: OK From eenriquez at snf.stanford.edu Tue May 4 09:54:24 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 May 2004 09:54:24 -0700 Subject: Problem stsetch 2004-05-03 19:02:27: doesn't pump down in time Message-ID: Loadlock controller was out of sync. Reset controller and the system computer From amyers at snf.stanford.edu Wed May 5 20:42:45 2004 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Wed, 5 May 2004 20:42:45 -0700 Subject: Shutdown stsetch 2004-05-05 20:42:44: match not matching Message-ID: From eenriquez at snf.stanford.edu Thu May 6 16:00:02 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 May 2004 16:00:02 -0700 Subject: Shutdown stsetch 2004-05-05 20:42:44: match not matching Message-ID: Replaced burnt out capacitors in the coil phase/mag detector. From quickwin at snf.stanford.edu Fri May 7 09:57:22 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Fri, 7 May 2004 09:57:22 -0700 Subject: Shutdown stsetch 2004-05-07 09:57:21: bad etch results from four users Message-ID: I did an etch last night for 2 hours and the trenches were totally dark instead of shiny. Three other users (Daesung, me342d, Barlian) eported similar experience this morning. The machine seems to coat a brown film on wafers. From eenriquez at snf.stanford.edu Fri May 7 16:31:23 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 May 2004 16:31:23 -0700 Subject: Shutdown stsetch 2004-05-07 09:57:21: bad etch results from four users Message-ID: RF power was not getting to the platten. Replaced the phase/magnitude detector for the platten. Ran several etch test; wafers looked normal. No brown film. From lindaw at snf.stanford.edu Mon May 24 11:49:24 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 24 May 2004 11:49:24 -0700 Subject: Problem stsetch 2004-05-24 11:49:24: communication error message Message-ID: process still running!!! From lindaw at snf.stanford.edu Mon May 24 12:00:07 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 24 May 2004 12:00:07 -0700 Subject: Shutdown stsetch 2004-05-24 12:00:06: communication error, wafer still in chamber Message-ID: communication error, wafer still in chamber. From jhaydon at snf.stanford.edu Mon May 24 12:28:32 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 24 May 2004 12:28:32 -0700 Subject: Shutdown stsetch 2004-05-24 12:00:06: communication error, wafer still in chamber Message-ID: From cbaxter at snf.stanford.edu Mon May 24 16:23:40 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 24 May 2004 16:23:40 -0700 Subject: Problem stsetch 2004-05-24 11:49:24: communication error message Message-ID: system reset