From korgan at snf.stanford.edu Sun Nov 7 05:21:29 2004 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Sun, 7 Nov 2004 05:21:29 -0800 Subject: Shutdown stsetch SNF 2004-11-07 05:21:28: Broken Wafer in Chamber Message-ID: From mcvittie at snf.stanford.edu Sun Nov 7 16:52:19 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 7 Nov 2004 16:52:19 -0800 Subject: Shutdown stsetch SNF 2004-11-07 05:21:28: Broken Wafer in Chamber Message-ID: Eric removed wafer pieces. jim From okilic at snf.stanford.edu Sun Nov 7 23:42:03 2004 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Sun, 7 Nov 2004 23:42:03 -0800 Subject: Problem stsetch SNF 2004-11-07 23:42:01: transfer or software problem Message-ID: Software doesn't allow to choose "Vent", "Load", or "Unload" in the Transfer window. Loadlock is vented, can put in wafer, but not proceed any further. From eenriquez at snf.stanford.edu Mon Nov 8 08:52:32 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Nov 2004 08:52:32 -0800 Subject: Problem stsetch SNF 2004-11-07 23:42:01: transfer or software problem Message-ID: Reset the wafer handler and the software. Cycled wafers From eenriquez at snf.stanford.edu Mon Nov 15 11:15:35 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Nov 2004 11:15:35 -0800 Subject: Shutdown stsetch SNF 2004-11-15 11:15:34: loadlock is out of sync with system Message-ID: From cbaxter at snf.stanford.edu Mon Nov 15 23:14:16 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Nov 2004 23:14:16 -0800 Subject: Shutdown stsetch SNF 2004-11-15 11:15:34: loadlock is out of sync with system Message-ID: load only pump down to 130mt. hooked up leak detector and found 2 decade leak on load arm shaft feedthru. changed oring on feedthru. From dwburns at snf.stanford.edu Tue Nov 16 07:11:30 2004 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Tue, 16 Nov 2004 07:11:30 -0800 Subject: Problem stsetch SNF 2004-11-16 07:11:30: Wafer numbers are not being incremented nor logged. Message-ID: From eenriquez at snf.stanford.edu Tue Nov 16 07:53:07 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Nov 2004 07:53:07 -0800 Subject: Problem stsetch SNF 2004-11-16 07:11:30: Wafer numbers are not being incremented nor logged. Message-ID: In the Wafer Transfer window, I set the last wafer number count in the manual mode and then switched to auto. From mislam at snf.stanford.edu Thu Nov 25 11:13:48 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 25 Nov 2004 11:13:48 -0800 Subject: Problem stsetch SNF 2004-11-25 11:13:48: 'Communication lost' error Message-ID: Won't run From mislam at snf.stanford.edu Fri Nov 26 09:10:26 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 26 Nov 2004 09:10:26 -0800 Subject: Problem stsetch SNF 2004-11-26 09:10:25: Error fixed Message-ID: Machine runs ok From cbaxter at snf.stanford.edu Mon Nov 29 17:26:44 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 29 Nov 2004 17:26:44 -0800 Subject: Problem stsetch SNF 2004-11-26 09:10:25: Error fixed Message-ID: reset system From cbaxter at snf.stanford.edu Mon Nov 29 17:26:59 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 29 Nov 2004 17:26:59 -0800 Subject: Problem stsetch SNF 2004-11-25 11:13:48: 'Communication lost' error Message-ID: reset system From weigao at snf.stanford.edu Tue Nov 30 16:34:05 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Tue, 30 Nov 2004 16:34:05 -0800 Subject: Shutdown stsetch SNF 2004-11-30 16:34:05: wafer transfer failed Message-ID: