Problem stsetch SNF 2004-11-07 23:42:01: transfer or software problem

okilic at snf.stanford.edu okilic at snf.stanford.edu
Sun Nov 7 23:42:03 PST 2004


Software doesn't allow to choose "Vent", "Load", or "Unload" in the Transfer window. Loadlock is vented, can put in wafer, but not proceed any further.




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