From axiu at snf.stanford.edu  Sat Sep  4 11:10:24 2004
From: axiu at snf.stanford.edu (axiu at snf.stanford.edu)
Date: Sat, 4 Sep 2004 11:10:24 -0700
Subject: Problem stsetch SNF 2004-09-04 11:10:23: wafer can't be taken out (not broken)
Message-ID: <mailman.898.1357938648.25867.stsetch-pcs@snf.stanford.edu>

After sending wafer into etch chamber, the wafer  transfer part doesnot come back to home position smoothly.  Inside Wafer does not show itself in the status view window. 



From ericp at snf.stanford.edu  Sat Sep  4 11:43:03 2004
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Sat, 4 Sep 2004 11:43:03 -0700
Subject: Comment stsetch SNF 2004-09-04 11:43:03: above problem resolved
Message-ID: <mailman.899.1357938648.25867.stsetch-pcs@snf.stanford.edu>

The problem by axiu has been resolved. Comm failure. 
Reset and all is well.  



From eenriquez at snf.stanford.edu  Tue Sep  7 07:56:50 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 7 Sep 2004 07:56:50 -0700
Subject: Comment stsetch SNF 2004-09-04 11:43:03: above problem resolved
Message-ID: <mailman.900.1357938649.25867.stsetch-pcs@snf.stanford.edu>

Thanks



From eenriquez at snf.stanford.edu  Tue Sep  7 07:57:24 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 7 Sep 2004 07:57:24 -0700
Subject: Problem stsetch SNF 2004-09-04 11:10:23: wafer can't be taken out (not broken)
Message-ID: <mailman.901.1357938649.25867.stsetch-pcs@snf.stanford.edu>

Communication error.  Eric reset communication.



From okilic at snf.stanford.edu  Tue Sep  7 21:52:22 2004
From: okilic at snf.stanford.edu (okilic at snf.stanford.edu)
Date: Tue, 7 Sep 2004 21:52:22 -0700
Subject: Problem stsetch SNF 2004-09-07 21:52:22: No Plasma
Message-ID: <mailman.902.1357938649.25867.stsetch-pcs@snf.stanford.edu>

"Power out of tolerance" error message. No plasma. (Was using DEEP.)



From cbaxter at snf.stanford.edu  Tue Sep  7 22:02:41 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 7 Sep 2004 22:02:41 -0700
Subject: Problem stsetch SNF 2004-09-07 21:52:22: No Plasma
Message-ID: <mailman.903.1357938649.25867.stsetch-pcs@snf.stanford.edu>

found chiller down the basement off. refilled chiller with
di water.



From mislam at snf.stanford.edu  Wed Sep  8 08:07:09 2004
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Wed, 8 Sep 2004 08:07:09 -0700
Subject: Problem stsetch SNF 2004-09-08 08:07:08: No plasma, platen power tolerance error
Message-ID: <mailman.904.1357938649.25867.stsetch-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Sep  8 08:23:33 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Sep 2004 08:23:33 -0700
Subject: Shutdown stsetch SNF 2004-09-08 08:23:32: No RF plasma
Message-ID: <mailman.905.1357938649.25867.stsetch-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Sep  8 23:16:58 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 8 Sep 2004 23:16:58 -0700
Subject: Shutdown stsetch SNF 2004-09-08 08:23:32: No RF plasma
Message-ID: <mailman.906.1357938649.25867.stsetch-pcs@snf.stanford.edu>

installed used filter housing and new risen filter.



From cbaxter at snf.stanford.edu  Wed Sep  8 23:17:05 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 8 Sep 2004 23:17:05 -0700
Subject: Problem stsetch SNF 2004-09-08 08:07:08: No plasma, platen power tolerance error
Message-ID: <mailman.907.1357938649.25867.stsetch-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Sep  9 00:31:11 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 9 Sep 2004 00:31:11 -0700
Subject: Shutdown stsetch SNF 2004-09-09 00:31:11: no plasma. water resistivity drop from 5meg to 100+kohm.
Message-ID: <mailman.908.1357938649.25867.stsetch-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Thu Sep  9 08:24:43 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 9 Sep 2004 08:24:43 -0700
Subject: Shutdown stsetch SNF 2004-09-09 00:31:11: no plasma. water resistivity drop from 5meg to 100+kohm.
Message-ID: <mailman.909.1357938649.25867.stsetch-pcs@snf.stanford.edu>

Emptied and refiled the chiller with DI water.  Waited about 1/2 hour for the resistivity to stabilize.  Ran the DEEP recipe 2X with no problems.



From ericp at snf.stanford.edu  Sun Sep 12 00:44:36 2004
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Sun, 12 Sep 2004 00:44:36 -0700
Subject: Problem stsetch SNF 2004-09-12 00:44:36: Platen RF intermittent
Message-ID: <mailman.910.1357938649.25867.stsetch-pcs@snf.stanford.edu>

Platen RF is intermittent.  Sometimes it 
causes an out-of-tolerance alarm.  
Appears to be an external interlock (water/chiller/
resistivity??) problem again.  



From cbaxter at snf.stanford.edu  Mon Sep 20 21:33:25 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 20 Sep 2004 21:33:25 -0700
Subject: Shutdown stsetch SNF 2004-09-20 21:33:24: need to change broken ceramic finger
Message-ID: <mailman.911.1357938649.25867.stsetch-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Sep 20 23:20:37 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 20 Sep 2004 23:20:37 -0700
Subject: Shutdown stsetch SNF 2004-09-20 21:33:24: need to change broken ceramic finger
Message-ID: <mailman.912.1357938649.25867.stsetch-pcs@snf.stanford.edu>

changed ceramic finger,lip seal and all 16 teflon insulator.