Problem stsetch SNF 2004-09-04 11:10:23: wafer can't be taken out (not broken)

axiu at snf.stanford.edu axiu at snf.stanford.edu
Sat Sep 4 11:10:24 PDT 2004


After sending wafer into etch chamber, the wafer  transfer part doesnot come back to home position smoothly.  Inside Wafer does not show itself in the status view window. 




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