From dwburns at snf.stanford.edu Sun Apr 3 12:34:30 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 3 Apr 2005 12:34:30 -0700 Subject: Problem stsetch SNF 2005-04-03 12:34:29: ICP compressed air fault; transfer mode failure Message-ID: From eenriquez at snf.stanford.edu Mon Apr 4 08:55:22 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Apr 2005 08:55:22 -0700 Subject: Problem stsetch SNF 2005-04-03 12:34:29: ICP compressed air fault; transfer mode failure Message-ID: Cleared the error. Increased the CDA booster pump pressure. Cycled handling several times with no problems. Left the users wafer inside the loadlock. From daesung at snf.stanford.edu Sun Apr 10 03:23:47 2005 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sun, 10 Apr 2005 03:23:47 -0700 Subject: Problem stsetch SNF 2005-04-10 03:23:46: Platen power out of tolerance Message-ID: From kevhuang at snf.stanford.edu Sun Apr 10 15:15:54 2005 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sun, 10 Apr 2005 15:15:54 -0700 Subject: Problem stsetch SNF 2005-04-10 15:15:53: coil and platen power remain precisely zero during the whole process Message-ID: From weigao at snf.stanford.edu Sun Apr 10 16:03:45 2005 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Sun, 10 Apr 2005 16:03:45 -0700 Subject: Problem stsetch SNF 2005-04-10 16:03:44: no plasma Message-ID: From eenriquez at snf.stanford.edu Mon Apr 11 11:18:07 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Apr 2005 11:18:07 -0700 Subject: Problem stsetch SNF 2005-04-10 16:03:44: no plasma Message-ID: Low water resistivity. Disabled resistivity sensor, should be ok to run for a few days without the sensor. Will order and replace the filter. From eenriquez at snf.stanford.edu Mon Apr 11 11:18:24 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Apr 2005 11:18:24 -0700 Subject: Problem stsetch SNF 2005-04-10 15:15:53: coil and platen power remain precisely zero during the whole process Message-ID: Low water resistivity. Disabled resistivity sensor, should be ok to run for a few days without the sensor. Will order and replace the filter. From eenriquez at snf.stanford.edu Mon Apr 11 11:18:51 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Apr 2005 11:18:51 -0700 Subject: Problem stsetch SNF 2005-04-10 03:23:46: Platen power out of tolerance Message-ID: Low water resistivity. Disabled resistivity sensor, should be ok to run for a few days without the sensor. Will order and replace the filter. From daesung at snf.stanford.edu Mon Apr 11 19:52:48 2005 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Mon, 11 Apr 2005 19:52:48 -0700 Subject: Shutdown stsetch SNF 2005-04-11 19:52:46: Message-ID: From cbaxter at snf.stanford.edu Mon Apr 11 21:33:59 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 11 Apr 2005 21:33:59 -0700 Subject: Shutdown stsetch SNF 2005-04-11 19:52:46: Message-ID: two problem rf out of tolerance and wafer broke during unload. the reason why wafer broke in the chamber transfer lose comunication instead of unloading a wafer it when to load sequence. vented chamber vacuum out small pieces of broken wafer. wiped down chamber with water and ipa. From xzhuan1 at snf.stanford.edu Tue Apr 26 17:34:45 2005 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 26 Apr 2005 17:34:45 -0700 Subject: Problem stsetch SNF 2005-04-26 17:34:44: software problem Message-ID: software crashed while changing recipe. I cannot get it back to the operator mode. From cbaxter at snf.stanford.edu Tue Apr 26 19:13:27 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 26 Apr 2005 19:13:27 -0700 Subject: Problem stsetch SNF 2005-04-26 17:34:44: software problem Message-ID: pc locked up. reset system handler and pc. From dwburns at snf.stanford.edu Thu Apr 28 06:02:13 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 28 Apr 2005 06:02:13 -0700 Subject: Problem stsetch SNF 2005-04-28 06:02:13: Coil power is zero Message-ID: Plasma does not come on; coil power is "out of compliance". From eenriquez at snf.stanford.edu Thu Apr 28 08:25:19 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Apr 2005 08:25:19 -0700 Subject: Problem stsetch SNF 2005-04-28 06:02:13: Coil power is zero Message-ID: Turned heat exchanger back on. Ran deep recipe with no problems