Problem stsetch SNF 2005-04-03 12:34:29: ICP compressed air fault; transfer mode failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 4 08:55:22 PDT 2005


Cleared the error.  Increased the CDA booster pump pressure.  Cycled handling several times with no problems.  Left the users wafer inside the loadlock.




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