Shutdown stsetch SNF 2005-04-11 19:52:46:

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Apr 11 21:33:59 PDT 2005


two problem rf out of tolerance and wafer broke during unload.
the reason why wafer broke in the chamber  transfer lose
comunication instead of unloading a wafer it when to load
sequence. vented chamber vacuum out small pieces of broken
wafer. wiped down chamber with water and ipa.




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