Problem stsetch SNF 2005-08-17 13:23:57: wipe caught in load chamber o-ring seal

bchui at snf.stanford.edu bchui at snf.stanford.edu
Wed Aug 17 13:23:58 PDT 2005


A piece of wipe was caught in Load chamber O-ring seal, so chamber won't pump down sufficiently to allow loading, yet is tightly sealed enough that I can't open the lid to dislodge the wipe.  (Etch chamber itself is fine; etches no problem.)  Machine software is in a limbo state; won't load, won't vent either.




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