Shutdown stsetch SNF 2005-08-17 14:42:49: Wiper caught on loadlock door with wafer inside

crichter at snf.stanford.edu crichter at snf.stanford.edu
Wed Aug 17 14:42:49 PDT 2005


A piece of wiper was found over the o-ring on the sealed  loadlock door. Vent command will not work.
Dick Crane recommended a shutdown. On the monitor I saw the following Fault and Alarm message:
Release of 1648 Failed. Pumpout time exceeded.
Alarm lock excessive pumpdown time alarm.
STS etcher may not be available until after 4pm today.




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