Shutdown stsetch SNF 2005-08-17 14:42:49: Wiper caught on loadlock door with wafer inside

cbaxter at cbaxter at
Wed Aug 17 16:38:37 PDT 2005

Manually close load lock isolation valve and vented
load lock manually. Removed piece of wipe on top of the
load lock door and also, removed sample wafer on load arm.

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