Shutdown stsetch SNF 2005-08-17 14:42:49: Wiper caught on loadlock door with wafer inside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Aug 17 16:38:37 PDT 2005


Manually close load lock isolation valve and vented
load lock manually. Removed piece of wipe on top of the
load lock door and also, removed sample wafer on load arm.




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