From xzhuan1 at snf.stanford.edu Fri Dec 2 18:18:28 2005 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 2 Dec 2005 18:18:28 -0800 Subject: Problem stsetch SNF 2005-12-02 18:18:27: series communication error Message-ID: can't unload wafer from etch chamber. From ericp at snf.stanford.edu Fri Dec 2 22:01:54 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 2 Dec 2005 22:01:54 -0800 Subject: Problem stsetch SNF 2005-12-02 22:01:53: Machine Down Message-ID: Found the machine with the turbo OFF, red alarm, Overcurrent. The machine had been improperly rebooted, which apparently caused the turbo failure. Called Cesar, got turbo to come back alive, but loadlock cannot pump down. LL seems to SOFTpump to about 300mT, crosses over to HARDpump (verified by sound, and pneumatic) but it appears that the hardpump pneumatic valve is not opening. Lock pressure does not change at all when pneumatic pressure is applied to hardpump valve. hovers between 200-300mT. Cesar and I think that the pressure boosting pump may not be generating sufficient pressure to open the pneumatic valve. (or the valve is stuck). You can hear the pressure boosting pump working while trying to open the valve. I'm leaving it in YELLOW in case the LL valve starts working again. Cesar may come over the weekend to look at it. -Eric From praveen at snf.stanford.edu Sat Dec 3 09:53:29 2005 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Sat, 3 Dec 2005 09:53:29 -0800 Subject: Problem stsetch SNF 2005-12-03 09:53:28: could not remove wafer by venting Message-ID: I could not vent the loading chamber and remove the wafer left by Amin From eenriquez at snf.stanford.edu Mon Dec 5 11:51:26 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2005 11:51:26 -0800 Subject: Problem stsetch SNF 2005-12-03 09:53:28: could not remove wafer by venting Message-ID: loadlock would not pump down. Removed an intermittently leaky pump purge valve. Cycle 6 wafers through the system with no problems From eenriquez at snf.stanford.edu Mon Dec 5 11:51:48 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2005 11:51:48 -0800 Subject: Problem stsetch SNF 2005-12-02 22:01:53: Machine Down Message-ID: loadlock would not pump down. Removed an intermittently leaky pump purge valve. Cycle 6 wafers through the system with no problems From eenriquez at snf.stanford.edu Mon Dec 5 11:52:27 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2005 11:52:27 -0800 Subject: Problem stsetch SNF 2005-12-02 18:18:27: series communication error Message-ID: loadlock would not pump down. Removed an intermittently leaky pump purge valve. Cycle 6 wafers through the system with no problems From bchui at snf.stanford.edu Mon Dec 5 13:45:18 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 5 Dec 2005 13:45:18 -0800 Subject: Problem stsetch SNF 2005-12-05 13:45:16: Machine down: No RF platen power Message-ID: From eenriquez at snf.stanford.edu Mon Dec 5 16:10:58 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2005 16:10:58 -0800 Subject: Shutdown stsetch SNF 2005-12-05 16:10:58: Lost serial communication Message-ID: No RF problem is OK now. Low cooling water resistivity.. ICP lost serial communication when I was exercising the system. From cbaxter at snf.stanford.edu Mon Dec 5 18:39:24 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Dec 2005 18:39:24 -0800 Subject: Shutdown stsetch SNF 2005-12-05 16:10:58: Lost serial communication Message-ID: reseated cpu pcb and hard reset the tool. had to vent the chamber to removed the stuck wafer. From cbaxter at snf.stanford.edu Mon Dec 5 18:40:43 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Dec 2005 18:40:43 -0800 Subject: Problem stsetch SNF 2005-12-05 13:45:16: Machine down: No RF platen power Message-ID: rf is working fine. From iwjung at snf.stanford.edu Tue Dec 13 03:58:18 2005 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Tue, 13 Dec 2005 03:58:18 -0800 Subject: Shutdown stsetch SNF 2005-12-13 03:58:17: icp comm failure Message-ID: icp comm failure after loading wafer. Please unload wafer. From cbaxter at snf.stanford.edu Tue Dec 13 08:15:06 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 13 Dec 2005 08:15:06 -0800 Subject: Shutdown stsetch SNF 2005-12-13 03:58:17: icp comm failure Message-ID: vented chsmber and recovered wafer. reboot system and ran 30 mins o2 clean.