Problem stsetch SNF 2005-12-02 18:18:27: series communication error
xzhuan1 at snf.stanford.edu
xzhuan1 at snf.stanford.edu
Fri Dec 2 18:18:28 PST 2005
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Problem stsetch SNF 2005-12-02 18:18:27: series communication error
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can't unload wafer from etch chamber.
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Problem stsetch SNF 2005-12-02 18:18:27: series communication error
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