Problem stsetch SNF 2005-12-03 09:53:28: could not remove wafer by venting

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Dec 5 11:51:26 PST 2005


loadlock would not pump down.  Removed an intermittently leaky pump purge valve.  Cycle 6 wafers through the system with no problems




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