Problem stsetch SNF 2005-12-02 18:18:27: series communication error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Dec 5 11:52:27 PST 2005
loadlock would not pump down. Removed an intermittently leaky pump purge valve. Cycle 6 wafers through the system with no problems
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