From eenriquez at snf.stanford.edu Tue Feb 1 07:41:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Feb 2005 07:41:45 -0800 Subject: Shutdown stsetch SNF 2005-02-01 07:41:44: SF6 cylinder change Message-ID: From eenriquez at snf.stanford.edu Tue Feb 1 09:21:24 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Feb 2005 09:21:24 -0800 Subject: Shutdown stsetch SNF 2005-02-01 07:41:44: SF6 cylinder change Message-ID: completed sf6 bottle change From mislam at snf.stanford.edu Thu Feb 10 08:00:05 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 10 Feb 2005 08:00:05 -0800 Subject: Problem stsetch SNF 2005-02-10 08:00:05: 'ICP not available' error Message-ID: Intermitten problem, sometime happens in the middle of a run and process stops. Most other time it happens while in the final pumpdown. It'e been like that for a while. From eenriquez at snf.stanford.edu Thu Feb 10 10:45:12 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Feb 2005 10:45:12 -0800 Subject: Problem stsetch SNF 2005-02-10 08:00:05: 'ICP not available' error Message-ID: Drive C: was full. Removed 3 application. Internet explorer, microsoft works and MS office. Now has about 17 Mbytes of space From mperez at snf.stanford.edu Fri Feb 11 04:16:21 2005 From: mperez at snf.stanford.edu (mperez at snf.stanford.edu) Date: Fri, 11 Feb 2005 04:16:21 -0800 Subject: Shutdown stsetch SNF 2005-02-11 04:16:19: C4F8 bottle empty? Message-ID: From rcrane at snf.stanford.edu Fri Feb 11 07:31:31 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 11 Feb 2005 07:31:31 -0800 Subject: Shutdown stsetch SNF 2005-02-11 04:16:19: C4F8 bottle empty? Message-ID: Reset auto change-over panel From latta at snf.stanford.edu Tue Feb 15 11:22:17 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 15 Feb 2005 11:22:17 -0800 Subject: Problem stsetch SNF 2005-02-15 11:22:17: polymer building up on chuck Message-ID: probably needs to be cleaned. From gyama at snf.stanford.edu Tue Feb 15 18:21:19 2005 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 15 Feb 2005 18:21:19 -0800 Subject: Problem stsetch SNF 2005-02-15 18:21:18: compressed air fault Message-ID: From cbaxter at snf.stanford.edu Tue Feb 15 20:53:15 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Feb 2005 20:53:15 -0800 Subject: Problem stsetch SNF 2005-02-15 18:21:18: compressed air fault Message-ID: software error. reboot system. From cbaxter at snf.stanford.edu Tue Feb 15 20:55:17 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Feb 2005 20:55:17 -0800 Subject: Problem stsetch SNF 2005-02-15 11:22:17: polymer building up on chuck Message-ID: vented chamber. inspect cathode and cleaned with water and ipa. i ran 20 minutes of o2 clean. From kevhuang at snf.stanford.edu Sat Feb 19 15:29:15 2005 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sat, 19 Feb 2005 15:29:15 -0800 Subject: Problem stsetch SNF 2005-02-19 15:29:14: loading arm is sometimes stuck Message-ID: From cbaxter at snf.stanford.edu Tue Feb 22 21:01:56 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 22 Feb 2005 21:01:56 -0800 Subject: Problem stsetch SNF 2005-02-19 15:29:14: loading arm is sometimes stuck Message-ID: cleaned guide shaft From dwburns at snf.stanford.edu Sat Feb 26 12:44:47 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sat, 26 Feb 2005 12:44:47 -0800 Subject: Problem stsetch SNF 2005-02-26 12:44:46: Compressed air fault - no go. Message-ID: From eenriquez at snf.stanford.edu Mon Feb 28 08:41:04 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Feb 2005 08:41:04 -0800 Subject: Problem stsetch SNF 2005-02-26 12:44:46: Compressed air fault - no go. Message-ID: No problem found. Ran a dummy wafer with no faults. From eenriquez at snf.stanford.edu Mon Feb 28 08:43:10 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Feb 2005 08:43:10 -0800 Subject: Comment stsetch SNF 2005-02-28 08:43:09: Hard drive (C:) was full Message-ID: Removed two applications, Internet explorer and Power point. Now has about 10 Mb. From mislam at snf.stanford.edu Mon Feb 28 12:08:09 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 28 Feb 2005 12:08:09 -0800 Subject: Comment stsetch SNF 2005-02-28 12:08:09: Wafers are sitting off-centered on the chuck Message-ID: