Shutdown stsetch SNF 2005-01-21 11:51:53: piece still in sts

pcastle at snf.stanford.edu pcastle at snf.stanford.edu
Fri Jan 21 11:51:54 PST 2005


My wafer broke in the sts and i got 95% of it out.  There is a small piece missing and I assume it is still in the chamber.
sorry, 
pat




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