Shutdown stsetch SNF 2005-01-21 11:51:53: piece still in sts
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jan 21 15:05:53 PST 2005
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Shutdown stsetch SNF 2005-01-21 11:51:53: piece still in sts
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Shutdown stsetch SNF 2005-01-24 01:13:26: Unable to unload my wafer from the chamber
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Vented and cleaned chamber. Ran O2 clean.
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Shutdown stsetch SNF 2005-01-21 11:51:53: piece still in sts
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Shutdown stsetch SNF 2005-01-24 01:13:26: Unable to unload my wafer from the chamber
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