Shutdown stsetch SNF 2005-01-24 01:13:26: Unable to unload my wafer from the chamber

jasmine at snf.stanford.edu jasmine at snf.stanford.edu
Mon Jan 24 01:13:27 PST 2005


I finished the process and pressed skip, however the unload button didn't light up and a message on the screen appeared notifying me that the ICP is not available




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