Shutdown stsetch SNF 2005-01-31 10:51:52: broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 31 12:18:20 PST 2005


Removed broken wafer from the chamber.  Looks like the wafer had some resist or developer on the backside.  Ran test with no problems.




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