From crichter at snf.stanford.edu Tue Jul 19 19:28:00 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 19 Jul 2005 19:28:00 -0700 Subject: Problem stsetch SNF 2005-07-19 19:27:59: ICP Alarm Message-ID: Once in a while toward the end of the etch step an "ICP Not Available Alarm" message will appear and then disappear within a few seconds. The next run went fine. From cbaxter at snf.stanford.edu Tue Jul 19 20:48:45 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 19 Jul 2005 20:48:45 -0700 Subject: Problem stsetch SNF 2005-07-19 19:27:59: ICP Alarm Message-ID: reboot pc and reset icp From axiu at snf.stanford.edu Fri Jul 22 02:16:27 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Fri, 22 Jul 2005 02:16:27 -0700 Subject: Problem stsetch SNF 2005-07-22 02:16:26: general protection fault message Message-ID: can't change recipe. From eenriquez at snf.stanford.edu Fri Jul 22 08:18:25 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Jul 2005 08:18:25 -0700 Subject: Problem stsetch SNF 2005-07-22 02:16:26: general protection fault message Message-ID: No problem found. User already running the tool. From griffin at snf.stanford.edu Fri Jul 22 18:17:30 2005 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Fri, 22 Jul 2005 18:17:30 -0700 Subject: Problem stsetch SNF 2005-07-22 18:17:29: Disk full Message-ID: Unable to edit recipe because disk is full. From cbaxter at snf.stanford.edu Fri Jul 22 19:13:14 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 22 Jul 2005 19:13:14 -0700 Subject: Problem stsetch SNF 2005-07-22 18:17:29: Disk full Message-ID: User create illegal recipe time. Time must be < 10hrs (09:59:59 is max). Recipe FASTDEEP erased- recreated file, but correct recipe parameters need to be entered. From cbaxter at snf.stanford.edu Fri Jul 22 19:14:28 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 22 Jul 2005 19:14:28 -0700 Subject: Comment stsetch SNF 2005-07-22 19:14:27: FASTDEEP recipe need to be re-entered Message-ID: FastDeep was corrupted- file has been re-created, but parameters are not correct. From axiu at snf.stanford.edu Sat Jul 23 17:46:07 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Sat, 23 Jul 2005 17:46:07 -0700 Subject: Problem stsetch SNF 2005-07-23 17:46:07: Normal operatino,but unload does not take out wafer is good Message-ID: From eenriquez at snf.stanford.edu Mon Jul 25 08:45:48 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Jul 2005 08:45:48 -0700 Subject: Problem stsetch SNF 2005-07-23 17:46:07: Normal operatino,but unload does not take out wafer is good Message-ID: No problem found. From me342d at snf.stanford.edu Wed Jul 27 06:23:55 2005 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Wed, 27 Jul 2005 06:23:55 -0700 Subject: Problem stsetch SNF 2005-07-27 06:23:55: wafer crack Message-ID: Wafer cracked during processing but didn't shatter. I was unable to tell the wafer was broken until I unloaded it from the chamber. I was using the holder and had another wafer underneath since this was a through-wafer etch. From eenriquez at snf.stanford.edu Wed Jul 27 07:57:14 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jul 2005 07:57:14 -0700 Subject: Problem stsetch SNF 2005-07-27 06:23:55: wafer crack Message-ID: I don't believe the wafer holder was designed to hold two wafers at the same time. The top wafer might over heat because the backside helium cooling will not be as effective through the double wafers. From me342f at snf.stanford.edu Sat Jul 30 07:59:13 2005 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Sat, 30 Jul 2005 07:59:13 -0700 Subject: Comment stsetch SNF 2005-07-30 07:59:12: Message-ID: