Problem stsetch SNF 2005-07-19 19:27:59: ICP Alarm

crichter at snf.stanford.edu crichter at snf.stanford.edu
Tue Jul 19 19:28:00 PDT 2005


Once in a while toward the end of the etch step an "ICP Not Available Alarm" message will appear and then disappear within a few seconds. The next run went fine.




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