Problem stsetch SNF 2005-07-23 17:46:07: Normal operatino,but unload does not take out wafer is good
axiu at snf.stanford.edu
axiu at snf.stanford.edu
Sat Jul 23 17:46:07 PDT 2005
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Comment stsetch SNF 2005-07-22 19:14:27: FASTDEEP recipe need to be re-entered
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Problem stsetch SNF 2005-07-23 17:46:07: Normal operatino,but unload does not take out wafer is good
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Comment stsetch SNF 2005-07-22 19:14:27: FASTDEEP recipe need to be re-entered
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Problem stsetch SNF 2005-07-23 17:46:07: Normal operatino,but unload does not take out wafer is good
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